Contact over active gate structures using directed self-assembly for advanced integrated circuit structure fabrication
AssigneeIntel Corporation
InventorsPaul A. NYHUS, Charles H. WALLACE, Manish CHANDHOK, Mohit K. HARAN, Gurpreet SINGH, Eungnak HAN, Florian GSTREIN, Richard E. SCHENKER, David SHYKIND, Jinnie ALOYSIUS, Sean PURSEL
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