Semiconductor device, manufacturing method of semiconductor device, and storage device
OwnerXing JINinventor
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OwnerXing JINinventor
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A semiconductor device, a manufacturing method of the semiconductor device, and a storage device are provided. The method includes: providing a semiconductor substrate having multiple first areas and multiple second areas arranged alternately and adjacent to each other; forming on the semiconductor substrate laminated structures each intersecting with the first areas and the second areas; forming side wall structures on surfaces of the laminated structures; filling a sacrificial layer; etching the side wall structures in the first areas so that the laminated structure and the side wall structure form a step shape with the middle higher than both sides of the step shape; forming dielectric layers on the semiconductor substrate in the first areas; and flattening the dielectric layers and the bit lines to remove part of each of the dielectric layers and part of each of the laminated structures on a side away from the semiconductor substrate.
A manufacturing method of a semiconductor device, comprising:
A semiconductor device, comprising:
A storage device, comprising a semiconductor device,
Dependencies are inferred from the claim text.