Additive damascene process
AssigneeInternational Business Machines Corporation
InventorDavid Abraham
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AssigneeInternational Business Machines Corporation
InventorDavid Abraham
Estimating the term…
An embodiment of the invention may include a method of forming a device and the resulting structure. The method may include forming a first conductive pattern on a first surface of a substrate. The method may include depositing a first conformal layer on the first surface of the substrate and the first conductive pattern. The method may include planarizing the first conformal layer so that a top surface of the first conductive pattern is substantially planar to a top surface of the first conformal layer. The method may include forming a first electrical component on the top surface of the first conformal layer in contact with the first conductive pattern. This may enable wiring on different levels as the electrical components, while allowing the first electrical component to be built on a substantially planar surface.
A method of forming a device comprising:
A method of forming a device comprising:
The method of forming the device of claim 16 further comprising forming a second electrical component on the top surface of the second conformal layer in contact with the second niobium pattern.
A device comprising:
Dependencies are inferred from the claim text.