Electrode-embedded member and method for manufacturing same, electrostatic chuck, and ceramic heater
AssigneeNgk Spark Plug Co., Ltd.
InventorMasaki YABUHANA
Life of this patent
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Abstract
An electrode-embedded member 1 includes a ceramic-made substrate 2, an electrode 3, a connection member 4 containing at least one of tungsten and molybdenum and embedded in the substrate 2 in a state in which a first principal surface 4a faces the electrode 3 and is electrically connected to the electrode 3, and a hole portion 5 extending from an outer surface of the substrate 2 to a second principal surface 4b of the connection member 4. A buffer member 10 embedded in the substrate 2 contains at least a ceramic material forming the substrate 2 and a conductive material containing at least one of tungsten and molybdenum as a constituent element. The buffer member 10 covers at least part of an edge of the connection member 4.
Claims11
An electrode-embedded member comprising:
- a ceramic-made substrate;
- an electrode embedded in the substrate;
- a connection member containing at least one of tungsten and molybdenum and having a first principal surface and a second principal surface, the connection member being embedded in the substrate in a state in which the first principal surface faces the electrode and the connection member is electrically connected to the electrode;
- and
- a hole portion extending from an outer surface of the substrate to the second principal surface of the connection member,
- the electrode-embedded member being characterized in that
- a buffer member is embedded in the substrate,
- the buffer member contains at least a ceramic material and at least one of tungsten and molybdenum, and
- the buffer member covers at least part of an edge of the connection member.
Dependencies are inferred from the claim text.