Reticle pod having anti-collision gap structure
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Yi-Hsuan Lee, Hsing-Min Wen, Hsin-Min Hsueh
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Abstract
The invention discloses a reticle pod for receiving a reticle. The reticle pod includes a base and plural support device provided on the base for supporting the reticle. A first distance is defined between a peripheral area of a bottom surface of the reticle and an upward facing top surface of the base. A second distance is defined between a central area of the bottom surface of the base and the upward facing top surface of the base, wherein the central area is encircled by the peripheral area. The second distance is larger than the first distance.
Claims9
A reticle pod for receiving a reticle, the reticle pod comprising:
- a base;
- and
- a plurality of support devices disposed on the base to support the reticle, with a first distance defined between a peripheral area of a bottom surface of the reticle and an upward-facing top surface of the base, and a second distance defined between a central area of a bottom surface of the base and the upward-facing top surface of the base, wherein the central area is encircled by the peripheral area, and the second distance is greater than the first distance.
Dependencies are inferred from the claim text.