Treating vessel and liquid processing apparatus
AssigneeSemes Co., Ltd.
InventorsDae Sung KIM, Sang Eun NOH, Ho Jin JANG, Jae Hoon PARK
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Abstract
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus comprising: a treating vessel including an outer cup and an inner cup placed in an inner side of the outer cup, the inner cup and the outer cup in combination defining a recollecting route for a recollecting a liquid; a rotatable spin head placed within the treating vessel on which a cleaning jig is placed; wherein the treating vessel comprises a first protrusion protruding from an inner side surface of the outer cup to direct a cleaning liquid scattering from the cleaning jig toward a surface of the inner cup.
Claims20
A liquid processing apparatus comprising:
- a treating vessel including an outer cup and an inner cup placed in an inner side of the outer cup, the inner cup and the outer cup in combination defining a recollecting route for recollecting a liquid;
- and,
- a rotatable spin head placed within the treating vessel on which a cleaning jig is placed,
- wherein the treating vessel comprises a first protrusion protruding from an inner surface of the outer cup to direct a cleaning liquid scattering from the cleaning jig toward a surface of the inner cup.
A treating vessel provided to surround the spin head comprising:
- an outer cup including a vertical wall and an inclined wall inclined inwardly and upwardly from a top of the vertical wall;
- and
- an inner cup placed in an inner side of the outer cup, the inner cup and the outer cup on combination defining a recollecting route for recollecting a liquid,
- wherein the outer cup comprises a first protrusion protruding from an inner surface of the inclined wall to the inner cup.
A liquid processing apparatus comprising:
- a treating vessel including an outer cup and an inner cup placed in an inner side of the outer cup, the inner cup and the outer cup in combination defining a recollecting route for recollecting a liquid;
- a rotatable spin head placed within the treating vessel on which a cleaning jig is placed;
- and
- a cleaning liquid nozzle which sprays a cleaning liquid to the top surface of the cleaning jig to clean the treating vessel,
- wherein the outer cup comprises:
- a perpendicular vertical wall;
- and
- an inclined wall inclining inwardly and upwardly from a top of the vertical wall, with a first protrusion colliding with the cleaning liquid scattered from the cleaning jig to direct a cleaning liquid toward a surface of the inner cup.
Dependencies are inferred from the claim text.