Target, film forming apparatus, and method of manufacturing film formation object
AssigneeJsw Afty Corporation
InventorsHironori Torii, Kouji Kageyama
Life of this patent
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Abstract
An object is to extend the life of the target member. The target (TA2) is designed to have a symmetrical structure so as to realize an invertible configuration. According to this, even if the consumption of the target member (71) is large on the side closer to the plasma generation unit where the plasma density is high, the portion of the target member (71) which has been located on the side closer to the film formation object where the plasma density is low and is thus consumed less can be rearranged on the side closer to the plasma generation unit where the plasma density is high, by inverting the target (TA2).
Claims19
A target comprising:
- a target member having a cylindrical shape;
- and
- a support member configured to support the target member,
- wherein the support member has a wall portion in contact with the target member via an adhesive member,
- wherein the wall portion includes:
- a first portion formed to have a first thickness;
- a second portion formed to have a second thickness thicker than the first thickness;
- and
- a third portion formed to have the first thickness,
- wherein the second portion is sandwiched between the first portion and the third portion, and
- wherein the first portion and the third portion are symmetrically arranged with respect to a virtual plane which is orthogonal to a center line of the cylindrical shape and divides the target member into equal halves.
A film forming apparatus comprising:
- a holding unit configured to hold a film formation object;
- a plasma generation unit configured to generate plasma;
- a target provided between the holding unit and the plasma generation unit;
- and
- a fixing unit configured to fix the target,
- wherein the target includes:
- a target member having a cylindrical shape;
- and
- a support member configured to support the target member,
- wherein the support member has a wall portion in contact with the target member via an adhesive member,
- wherein the wall portion includes:
- a first portion formed to have a first thickness;
- a second portion formed to have a second thickness thicker than the first thickness;
- and
- a third portion formed to have the first thickness,
- wherein the second portion is sandwiched between the first portion and the third portion,
- wherein the first portion and the third portion are symmetrically arranged with respect to a virtual plane which is orthogonal to a center line of the cylindrical shape and divides the target member into equal halves, and
- wherein the fixing unit includes:
- a main body portion;
- and
- a pressing portion configured to press the target,
- the film forming apparatus further comprising:
- a first sealing member in contact with the first portion, the second portion, and the pressing portion;
- a second sealing member in contact with the second portion, the third portion, and the main body portion;
- and
- a third sealing member in contact with the main body portion and the pressing portion.
A method of manufacturing a film formation object comprising steps of:
- (a) forming a film on a first film formation object by using a cylindrical target which is provided between a holding unit configured to hold the first film formation object and a plasma generation unit configured to generate plasma and is fixed by a fixing unit;
- (b) after the step (a), detaching the first film formation object from the holding unit;
- (c) after the step (b), detaching the target from the fixing unit;
- (d) after the step (c), inverting the target and attaching the target to the fixing unit;
- (e) after the step (d), holding a second film formation object by the holding unit;
- and
- (f) after the step (e), forming a film on the second film formation object by using the target.
Dependencies are inferred from the claim text.