Systems and methods for repetitive tuning of matching networks

A radio frequency plasma processing device comprising:

• a reaction chamber;
• a radio frequency generator to supply radio frequency power to a plasma in the reaction chamber;
• a matching network comprising:
• a matching branch having a first variable capacitor and a second variable capacitor;
• and
• a splitter branch having a third variable capacitor and a fourth variable capacitor that are electrically connected to the first variable capacitor and the second variable capacitor;
• an outer coil connected to the third variable capacitor;
• an inner coil connected to the fourth variable capacitor;
• and
• a programmable logic controller connected to the matching network, the programmable logic controller to:
• detect a condition within the matching network;
• determine if the condition is a known condition for the matching network;
• find a prior solution to the condition when the condition is the known condition for the matching network;
• and
• replicate the prior solution for the condition in the matching network.

A non-transitory computer readable medium comprising computer executable instructions stored thereon that, when executed by one or more processing units cause the one or more processing units to:

• detect a condition within the matching network;
• determine if the condition is a known condition for the matching network;
• obtain a prior solution to the condition when the condition is the known condition for the matching network, the prior solution obtained from stored data of solutions to previously resolved conditions;
• and
• replicate the prior solution for the condition in the matching network.