Charged particle beam apparatus

A displaying method of outputting a display related to a charged particle beam apparatus, the displaying method comprising:

• a step of a processor displaying a first application result and a second application result on a display, the first application result being estimated when a charged particle beam estimated from a to-be-used-in-computation netlist and an optical condition is applied to a sample, the to-be-used-in-computation netlist being generated based on the to-be-used-in-calculation device model for use in estimation of a circuit of the sample, and the second application result being estimated when the charged particle beam is applied to the sample on a basis of the first application result and the optical condition,
• wherein the display of the first application result or the second application result includes at least one of
• a detection signal which is based on secondary electrons emitted from the sample by an application of the charged particle beam applied to the sample under the optical condition;
• a waveform indicating the detection signal;
• an inspection image which is based on the detection signal;
• brightness of the inspection image;
• brightness of each pixel of the inspection image;
• an estimated netlist;
• and
• a circuit diagram.

A computing method related to a charged particle beam apparatus, the computing method comprising:

• a step of a processor receiving, as a first input, an inspection result estimated when a sample forming an electric circuit is inspected using an inspection tool;
• a step of the processor receiving, as a second input, an inspection result of the electric circuit obtained from a netlist of the electric circuit or a circuit model which is based on the netlist;
• and
• a step of the processor updating at least one of the netlist and the circuit model according to the first input.