Back to results
US 2022/0102105 A1Published application
Charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsWen Li, Hajime Kawano, Momoyo Enyama, Makoto Sakakibara
Life of this patent
Estimating the term…
Abstract
Deflection of a secondary beam, and astigmatism correction of a primary beam or of the secondary beam are carried out using a multi-pole electromagnetic deflector which deflects the path of the secondary beam toward a detector.
Claims11
A charged particle beam device comprising:
- a charged particle gun that produces a primary beam;
- a stage on which a sample is placed;
- a detector that detects a secondary beam generated from the sample in response to the primary beam;
- a multi-pole electromagnetic deflector that deflects a path of the secondary beam;
- and
- a control circuit that controls the multi-pole electromagnetic deflector, wherein
- the multi-pole electromagnetic deflector includes
- electric field deflectors that generate an electric field, and
- magnetic field deflectors of which number is the same as the number of the electric field deflectors and which generate a magnetic field,
- the control circuit includes
- electric field deflector drive circuits, each driving the electric field deflector,
- a first astigmatism correction common voltage generating unit that controls the electric field deflector and outputs a first astigmatism correction voltage for carrying out astigmatism correction of the primary beam or the secondary beam,
- magnetic field deflector drive circuits, each driving the magnetic field deflector,
- a second astigmatism correction common voltage generating unit that controls the magnetic field deflector and outputs a second astigmatism correction voltage for carrying out astigmatism correction of the primary beam or the secondary beam,
- an electric field-magnetic field common control voltage generating unit that outputs a deflection common voltage for deflecting a path of the secondary beam to the detector to the electric field deflector drive circuit and the magnetic field deflector drive circuit,
- a first adder that adds the deflection common voltage and the first astigmatism correction voltage input directly or after adjustment and outputs a first added voltage to the electric field deflector drive circuit, and
- a second adder that adds the deflection common voltage and the second astigmatism correction voltage input directly or after adjustment and outputs a second added voltage to the magnetic field deflector drive circuit.
14 more elements
A charged particle beam device comprising:
- a charged particle gun that produces a primary beam;
- a stage on which a sample is placed;
- a detector that detects a secondary beam generated from the sample in response to the primary beam;
- a multi-pole electromagnetic deflector including a plurality of electrodes and a plurality of coils that deflects a path of the secondary beam;
- and
- a control circuit that controls the multi-pole electromagnetic deflector, wherein
- each of the number of electrodes and the number of coils included in the multi-pole electromagnetic deflector is N (but, N is an even number of 8 or more),
- the control circuit includes
- a plurality of drive circuits for electrodes for driving the electrodes,
- a plurality of adders for electrodes,
- a plurality of drive circuits for coils for driving the coil,
- a plurality of adders for coils,
- a plurality of electric field-magnetic field common control voltage generating units,
- a plurality of astigmatism correction common voltage generating units for electrodes, and
- a plurality of astigmatism correction common voltage generating units for coils,
- each of the number of the drive circuits for electrodes, the number of the adders for electrodes, the number of the drive circuits for coils, the number of the adders for coils, and the number of the electric field-magnetic field common control voltage generating units included in the control circuit is N,
- each of the number of astigmatism correction common voltage generating units for electrodes and the number of astigmatism correction common voltage generating units for coils included in the control circuit is N/G (but, G is an even number of 2 or more), and
- here, when an i-th component among a plurality of virtual or physical components included in the charged particle beam device is expressed as a component[i]
- (A) an electrode[n], a drive circuit for electrode[n], and an adder for electrode[n] are in 1:1:1 correspondence (where n is a natural number of N or less),
- (B) a coil[c], a drive circuit for coil[c], and an adder for coil[c] are in 1:1:1 correspondence (but, c is a natural number less than or equal to N and has a 1:1 correspondence relationship with n),
- (C) an electric field-magnetic field common control voltage generating unit[n] outputs a first voltage[n] to the adder for electrode[n] and the adder for coil[c],
- (D) an astigmatism correction common voltage generating unit for electrode[j] outputs a second voltage[j] to at least an adder for electrode[j] and an adder for electrode[1+((j−1+N/2) Mod N)] (but, j is a natural number less than or equal to N/G), and
- (E) a coil astigmatism correction common voltage generating unit[k] outputs a third voltage[k] to at least an adder for coil[k] and an adder for coil[1+((k−1+N/2) Mod N)] (but, k is a natural number less than and equal to N/G).
20 more elements
Dependencies are inferred from the claim text.