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US 2022/0101906 A1Published application
Novel capacitor structure and method of forming the same
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsLiang CHEN, Cheng GAN, Xin WU, Wei LIU
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Abstract
A capacitor is provided. The capacitor includes a substrate, at least two conductive plates formed in the substrate and extending into the substrate, at least one insulating structure formed between two adjacent conductive plates of the at least two conductive plates and extending into the substrate, and a plurality of contacts, each extending into respective one of the at least two conductive plates.
Claims20
A capacitor, comprising:
- a substrate;
- at least two conductive plates formed in the substrate and extending into the substrate;
- at least one insulating structure formed between two adjacent conductive plates of the at least two conductive plates and extending into the substrate;
- and
- a plurality of contacts, each extending into respective one of the at least two conductive plates.
2 more elements
A semiconductor device, comprising:
- a substrate;
- memory cells formed at a first location of the substrate;
- and
- a capacitor formed at a second location of the substrate, the capacitor comprising:
- at least two conductive plates that are formed in the substrate and extend into the substrate;
- at least one insulating structure that is formed between two adjacent conductive plates of the at least two conductive plates and extends into the substrate;
- and
- a plurality of contacts, each extending into respective one of the at least two conductive plates.
5 more elements
Dependencies are inferred from the claim text.