Alignment of a Specimen for Inspection and Other Processes

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for setting up alignment of a specimen, wherein the computer-implemented method comprises:

• acquiring two-dimensional images generated from output of a detector of an output acquisition subsystem at template locations in corresponding areas of printed instances on a specimen, wherein the two-dimensional images comprise a first image acquired at a first of the template locations and at least one additional image acquired at one or more other of the template locations, wherein the output acquisition subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy;
• determining offsets in x and y directions between the template locations, wherein determining the offsets comprises aligning the first image to the at least one additional image;
• determining an angle of the specimen with respect to the output acquisition subsystem based on the offsets in the x and y directions;
• comparing the determined angle to a predetermined value;
• when the determined angle is greater than the predetermined value, rotating the specimen and repeating the acquiring, determining the offsets, determining the angle, and comparing steps;
• and
• when the determined angle is less than the predetermined value, storing the first image for use in alignment of the specimen to the output acquisition subsystem during a process performed on the specimen, wherein the acquiring, determining the offsets, determining the angle, comparing, rotating, repeating, and storing steps are performed by the computer system.

A computer-implemented method for setting up alignment of a specimen, comprising:

• acquiring two-dimensional images generated from output of a detector of an output acquisition subsystem at template locations in corresponding areas of printed instances on a specimen, wherein the two-dimensional images comprise a first image acquired at a first of the template locations and at least one additional image acquired at one or more other of the template locations, wherein the output acquisition subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy;
• determining offsets in x and y directions between the template locations, wherein determining the offsets comprises aligning the first image to the at least one additional image;
• determining an angle of the specimen with respect to the output acquisition subsystem based on the offsets in the x and y directions;
• comparing the determined angle to a predetermined value;
• when the determined angle is greater than the predetermined value, rotating the specimen and repeating the acquiring, determining the offsets, determining the angle, and comparing steps;
• and
• when the determined angle is less than the predetermined value, storing the first image for use in alignment of the specimen to the output acquisition subsystem during a process performed on the specimen, wherein the acquiring, determining the offsets, determining the angle, comparing, rotating, repeating, and storing steps are performed by one or more computer subsystems.