Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

A non-transitory computer-readable recording medium storing a program that causes a controller to perform a process, wherein the program is executed in a substrate processing apparatus including at least one transfer mechanism configured to transfer a substrate, at least one processing mechanism configured to process the substrate, an earthquake detector configured to detect an earthquake, and the controller configured to control the at least one transfer mechanism and the at least one processing mechanism according to a detection result of the earthquake detector, the controller being configured to be capable of performing a stopping operation of the at least one transfer mechanism according to a P wave (initial tremor wave) and an S wave (principal fluctuation wave), the process comprising:

• receiving at least one selected from the group of the P wave and the S wave of the earthquake;
• and
• performing the stopping operation of the at least one transfer mechanism according to a detection signal of at least one selected from the group of the received P wave and S wave.