Transport system, processing system, and method of manufacturing article

Abstract

A transport system includes: a transport path housing; a first magnetic force unit provided in the transport path housing; a transport vehicle that includes a second magnetic force unit provided so as to be able to face the first magnetic force unit and is able to travel along the transport path housing while being levitated by magnetic force acting between the first magnetic force unit and the second magnetic unit; a rail on which the transport vehicle lands to be able to travel, the rail being provided in the transport path housing; and at least one moving means for moving the transport vehicle in a landing state where the transport vehicle lands on the rail, to a position where the transport vehicle is be able to be levitated by the magnetic force.

Dependencies are inferred from the claim text.