US 2022/0097203 A1 · CALIBRATION SYSTEM, CALIBRATION METHOD, AND CALIBRATION DEVICE

Abstract

A calibration system, a calibration method, and a calibration device configured to determine base information of a polish head to polish a workpiece through the polish head are provided. The base information comprises a first position. The calibration system includes the polish head, a controller, and a sensor group. The controller is coupled to the polish head and controls the polish head to move along a first direction. The sensor group detects a force that at least one of the polish head and the workpiece senses to generate a first pressure value. The controller determines whether the first pressure value is greater than a predetermined value. According to that the first pressure value is greater than the predetermined value, the first position is determined.

Claims20

Dependent claims

A calibration system configured to determine base information of a polish head to polish a workpiece through the polish head, the base information comprises a first position, the calibration system comprising:

the polish head;
a controller coupled to the polish head and configured to control the polish head to move along a first direction;
and
a sensor group configured to generate a first pressure value, wherein according to the polish head moving along the first direction, the sensor group detect a force to generate the first pressure value, wherein the force is detected from at least one of the polish head and the workpiece senses;
wherein the controller is further configured to:
determine that the first pressure value is greater than a predetermined value;
and
according to that the first pressure value is greater than the predetermined value, determine the first position.

5 more elements

A calibration method configured to determine base information of a polish head to polish a workpiece through the polish head, the base information comprises a first position, the calibration method comprising:

controlling the polish head to move along a first direction;
according to that the polish head is moving along the first direction, detecting a force that at least one of the polish head and the workpiece senses, to generate a first pressure value,
determining that the first pressure value is greater than a predetermined value;
and
according to that the first pressure value is greater than the predetermined value, determining the first position.

2 more elements

a controller coupled to the polish head and configured to control the polish head to move along a first direction and
receive a first pressure value from a sensor group, wherein the first pressure value is generated by a force that the at least one of the polish head and the workpiece senses, wherein the force detected by the sensor group according to that the polish head is moving along the first direction;
determine that the first pressure value is greater than a predetermined value;
and
according to that the first pressure value is greater than the predetermined value, determine the first position.

2 more elements

Dependencies are inferred from the claim text.

Calibration system, calibration method, and calibration device

Life of this patent

Calibration system, calibration method, and calibration device

Life of this patent

Abstract

Claims20