Substrate transfer system and atmospheric transfer module
AssigneeToyota Electron Limited
InventorsNorihiko AMIKURA, Toshiaki TOYOMAKI
Life of this patent
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Abstract
A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.
Claims13
A transfer system comprising:
- a load lock module;
- an atmospheric transfer module connected to the load lock module;
- a substrate transfer robot configured to simultaneously or separately transfer a substrate and an edge ring in the atmospheric transfer module;
- and
- an aligner module connected to the atmospheric transfer module, the aligner module being configured to correct misalignment of the substrate and misalignment of the edge ring.
An aligner module comprising:
- a rotating unit having a body and a plurality of ring supporting portions extending from the body to outward;
- a driving unit configured to rotate the rotating unit;
- a detector configured to detect a reference shape of the edge ring during which the edge ring on the plurality of ring supporting portions is rotated by rotation of the rotating unit;
- and
- a controller configured to correct misalignment of the edge ring based on a rotation angle of the edge ring when the reference shape of the edge ring is detected by the detector.
Dependencies are inferred from the claim text.