Wafer-measuring apparatus and wafer-transferring method thereof
AssigneeNanya Technology Corporation
InventorJih-Cheng HUANG
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Abstract
The present disclosure provides a wafer-measuring apparatus and a wafer-transferring method of the wafer-measuring apparatus. The wafer-measuring apparatus includes a body, a wafer-measuring unit, a wafer storage and a robot. The robot is disposed on the body and configured to: move a wafer from a first wafer container to the wafer-measuring unit, wherein the first wafer container is disposed on a load port area; and move the wafer from the wafer-measuring unit to the wafer storage after the wafer-measuring unit measures the wafer.
Claims20
A wafer-measuring apparatus, comprising:
- a body;
- a wafer-measuring unit;
- a wafer storage;
- and
- a robot, being disposed on the body and configured to:
- move a wafer from a first wafer container to the wafer-measuring unit, wherein the first wafer container is disposed on a load port area;
- and
- move the wafer from the wafer-measuring unit to the wafer storage after the wafer-measuring unit measures the wafer.
A wafer-measuring apparatus, comprising:
- a body including:
- a first area;
- a second area;
- and
- a buffer area;
- a wafer-measuring unit;
- a wafer storage;
- a first robot, being disposed on the first area of the body and configured to:
- move a wafer from a first wafer container to the wafer-measuring unit, wherein the first wafer container is disposed on a first load port area;
- and
- move the wafer from the wafer-measuring unit to the buffer area of the body after the wafer-measuring unit measures the wafer;
- and
- a second robot, being disposed on the second area of the body and configured to:
- move the wafer from the buffer area of the body to the wafer storage.
A wafer-transferring method of a wafer-measuring apparatus, comprising:
- moving, by a robot set of the wafer-measuring apparatus, a wafer from a first wafer container to a wafer-measuring unit of the wafer-measuring apparatus, wherein the first wafer container is disposed on a first load port area;
- measuring, by the wafer-measuring unit, the wafer;
- and
- moving, by the robot set, the wafer from the wafer-measuring unit to a wafer storage of the wafer-measuring apparatus after the wafer is measured.
Dependencies are inferred from the claim text.