Heating device and heating method
AssigneeTokyo Electron Limited
InventorsTakashi SUGIMOTO, Hiroyuki TAKAHASHI, Shinya OKANO
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Abstract
A heating device for heating a substrate is provided. The heating device comprises a support portion configured to support the substrate, and a light irradiation unit configured to heat the substrate by irradiating the substrate supported by the support portion with light. A plurality of zones are set in the light irradiation unit, and each of the plurality of zones set in the light irradiation unit irradiates different portions of a surface of the substrate supporeted by the support portion with light. During the heating by the light irradiation unit, the plurality of zones take turns so that some zones of the plurality of zones are utilized.
Claims13
A heating device for heating a substrate, comprising:
- a support portion configured to support the substrate;
- and
- a light irradiation unit configured to heat the substrate by irradiating the substrate supported by the support portion with light,
- wherein a plurality of zones are set in the light irradiation unit, and each of the plurality of zones set in the light irradiation unit irradiates different portions of a surface of the substrate supporeted by the support portion with light, and
- during the heating by the light irradiation unit, the plurality of zones take turns so that some zones of the plurality of zones are utilized.
A method of heating a substrate using a heating device, wherein:
- the heating device includes a support portion configured to support the substrate and a light irradiation unit having a plurality of zones set therein, each of the plurality of zones irradiating different portions of a surface of the substrate supporeted by the support portion with light;
- and
- the method comprises heating the substrate supported by the support portion using the light irradiation unit,
- wherein, in the heating of the substrate using the light irradiation unit, the plurality of zones take turns so that some zones of the plurality of zones are utilized.
Dependencies are inferred from the claim text.