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US 2022/0093372 A1Published application
Showerhead shroud
AssigneeLam Research Corporation
InventorsAndrew BORTH, Christopher RAMSAYER
Life of this patent
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Abstract
A processing chamber includes an upper surface and a showerhead arranged to supply gases through the upper surface into the processing chamber. At least a portion of the showerhead extends above the upper surface of the processing chamber. A shroud enclosure is arranged on the upper surface of the processing chamber. The shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber and is configured to isolate radio frequency interference generated by the showerhead.
Claims20
A processing chamber, comprising:
- an upper surface;
- a showerhead arranged to supply gases through the upper surface into the processing chamber, wherein at least a portion of the showerhead extends above the upper surface of the processing chamber;
- and
- a shroud enclosure arranged on the upper surface of the processing chamber, wherein the shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber, and wherein the shroud enclosure is configured to isolate radio frequency interference generated by the showerhead.
1 more element
A shroud enclosure, comprising:
- a bottom section including an opening arranged to receive a portion of a showerhead extending above an upper surface of a processing chamber and lower flange portions extending upward from outer edges of the bottom section;
- one or more side sections arranged on the bottom section within a perimeter defined by the lower flange portions;
- and
- a first top section and a second top section arranged on upper edges of the side sections,
- wherein the bottom section, the side sections, the first top section, and the second top section are separable from each other and, when assembled, are configured to isolate radio frequency interference generated by the showerhead.
2 more elements
Dependencies are inferred from the claim text.