Showerhead assembly with recursive gas channels

A showerhead assembly for use in a process chamber, comprising:

• a chill plate having one or more cooling channels disposed therein;
• a heater plate coupled to the chill plate, the heater plate having one or more heating elements embedded therein;
• and
• an upper electrode coupled to the heater plate, wherein the showerhead assembly includes a plurality of gas flow paths that are fluidly independent from each other, wherein each of the plurality of gas flow paths extend from a gas inlet on an upper surface of the chill plate to a recursive flow path within the chill plate to a plurality of outlets on a lower surface of the chill plate through a plurality of first gas distribution holes, a plurality of plenums, and a plurality of second gas distribution holes of the heater plate and through a plurality of third gas distribution holes of the upper electrode.

A process chamber, comprising:

• a chamber body defining an interior volume therein;
• a substrate support disposed in the interior volume to support a substrate;
• and
• a showerhead assembly disposed in the interior volume opposite the substrate support, wherein the showerhead assembly comprises:
• a chill plate having a plurality of recursive gas paths disposed therein that are fluidly independent from each other and one or more cooling channels disposed therein, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet extending to a first side of the chill plate and a plurality of gas outlets extending to a second side of the chill plate;
• a heater plate coupled to the chill plate, wherein the heater plate includes one or more heating elements embedded therein, a plurality of first gas distribution holes extending from a top surface thereof to a plurality of plenums that are fluidly independent disposed within the heater plate, the plurality of first gas distribution holes corresponding with the plurality of gas outlets of the chill plate, and a plurality of second gas distribution holes extending from the plurality of plenums to a lower surface of the heater plate;
• and
• an upper electrode coupled to the heater plate and having a plurality of third gas distribution holes, each of which are fluidly coupled to one of the plurality of second gas distribution holes of the heater plate.