Lamella alignment based on a reconstructed volume
AssigneeFEI Company
InventorsTomás ONDERLICKA, Jaroslav STÁREK, Lukás HÜBNER
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AssigneeFEI Company
InventorsTomás ONDERLICKA, Jaroslav STÁREK, Lukás HÜBNER
Estimating the term…
Apparatuses and methods for aligning lamella to charged particle beams based on a volume reconstruction are disclosed herein. An example method at least includes forming a reconstructed volume of a portion of a sample, the sample including a plurality of structures, and the reconstructed volume including a portion of the plurality of structures, performing, over a range of angles, a mathematical transform on each plane of a plurality of planes of the reconstructed volume, and based on the mathematical transform on each plane of the plurality of planes, determining a target orientation of the sample within the range of angles, wherein the target orientation aligns the plurality of structures parallel to an optical axis of a charged particle beam.
A method comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.