Dynamic scheduling based on task dependencies
AssigneeApplied Materials, Inc.
InventorMilind Jayram Gadre
Life of this patent
Estimating the term…
Abstract
A method includes determining a plurality of dependencies associated with a plurality of tasks of a substrate processing system. The method further includes generating, based on the plurality of dependencies, a dependency graph of the plurality of tasks. The method further includes topologically sorting the dependency graph to generate one or more outputs. A schedule associated with processing a plurality of substrates in the substrate processing system is based on the one or more outputs.
Claims20
A method comprising:
- determining a plurality of dependencies associated with a plurality of tasks of a substrate processing system;
- generating, based on the plurality of dependencies, a dependency graph of the plurality of tasks;
- and
- topologically sorting the dependency graph to generate one or more outputs, wherein a schedule associated with processing a plurality of substrates in the substrate processing system is based on the one or more outputs.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to perform operations comprising:
- determining a plurality of dependencies associated with a plurality of tasks of a substrate processing system;
- generating, based on the plurality of dependencies, a dependency graph of the plurality of tasks;
- and
- topologically sorting the dependency graph to generate one or more outputs, wherein a schedule associated with processing a plurality of substrates in the substrate processing system is based on the one or more outputs.
A system comprising:
- a memory;
- and
- a processing device coupled to the memory, wherein the processing device is to:
- determine a plurality of dependencies associated with a plurality of tasks of a substrate processing system;
- generate, based on the plurality of dependencies, a dependency graph of the plurality of tasks;
- and
- topologically sort the dependency graph to generate one or more outputs, wherein a schedule associated with processing a plurality of substrates in the substrate processing system is based on the one or more outputs.
Dependencies are inferred from the claim text.