Reticle transfer device and exposure system
AssigneeChangxin Memory Technologies, Inc.
InventorZicheng LIU
Life of this patent
Estimating the term…
Abstract
Provide are a reticle transfer device and an exposure system. The reticle transfer device includes a bearing member, a light source, a light detector and a controller. The bearing member is configured to bear the reticle, and the light source is configured to emit irradiation light to the reticle and form reflected light. The light detector is configured to obtain the reflected light and generate a light detection signal. The controller is configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal. The reticle transfer device can determine whether particulate matter exists on the surface of the reticle in real time based on the light detection signal.
Claims17
A reticle transfer device, configured to convey a reticle between different components, and comprising:
- a bearing member, configured to bear the reticle;
- a light source, the light source being arranged on, a side for bearing the reticle, of the bearing member, to emit an irradiation light to the reticle, wherein a reflected light is formed when the irradiation light is irradiated onto the reticle;
- a light detector, configured to obtain the reflected light and generate a light detection signal based on the reflected light;
- and
- a controller, electrically connected to the light detector and configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal.
An exposure system, comprising a plurality of components and a plurality of reticle transfer devices configured to convey at least one reticle between different components,
- wherein each of the reticle transfer devices comprises:
- a bearing member, configured to bear a reticle;
- a light source, the light source being arranged on, a side bearing for the reticle, of the bearing member, to emit an irradiation light to the reticle, wherein a reflected light is formed when the irradiation light is irradiated onto the reticle;
- a light detector, configured to obtain the reflected light and generate a light detection signal based on the reflected light;
- and
- a controller, electrically connected to the light detector and configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal.
Dependencies are inferred from the claim text.