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US 2022/0091402 A1Published application
Observation apparatus
AssigneeOlympus Corporation
InventorShinichi HAYASHI
Life of this patent
Estimating the term…
Abstract
An observation apparatus includes a first intensity modulation section arranged on an optical path of illumination light with which an observation object is to be irradiated, the first intensity modulation section modulating an intensity distribution of the illumination light, and a second intensity modulation section arranged on an optical path of observation light from the observation object irradiated with the illumination light, the second intensity modulation section modulating an intensity distribution of the observation light.
Claims20
An observation apparatus comprising:
- a first intensity modulation section arranged on an optical path of illumination light with which an observation object is to be irradiated, the first intensity modulation section modulating an intensity distribution of the illumination light;
- and
- a second intensity modulation section arranged on an optical path of observation light from the observation object irradiated with the illumination light, the second intensity modulation section modulating an intensity distribution of the observation light, wherein
- a first light utilization ratio distribution of the first intensity modulation section decreases in a first orientation, and
- a second light utilization ratio distribution of the second intensity modulation section increases in a second orientation corresponding to the first orientation.
2 more elements
An observation apparatus comprising:
- an illumination optical system that irradiates an observation object with illumination light;
- an observation optical system that guides observation light from the observation object into a detector;
- and
- an intensity modulation section that modulates an intensity distribution of the illumination light and an intensity distribution of the observation light, wherein
- the illumination optical system and the observation optical system share an objective lens,
- the intensity modulation section is arranged at an exit pupil position of the objective lens or a position optically conjugate with the exit pupil position, and
- a light utilization ratio distribution of the intensity modulation section decreases in a predetermined orientation perpendicular to an optical axis of the objective lens.
4 more elements
Dependencies are inferred from the claim text.