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US 2022/0091331 A1Published application
Waveguide absorbers
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng BIAN
Life of this patent
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to spiral waveguide absorbers and methods of manufacture. The structure includes: a photonics component; and a waveguide absorber with a grating pattern coupled to a node of the photonics component.
Claims21
A structure comprising:
- a photonics component;
- and
- a waveguide absorber with a grating pattern coupled to a node of the photonics component,
- wherein the waveguide absorber comprises alternating wide regions and narrow regions, and the grating pattern is a gap between a pair of the wide regions and adjacent to the narrow region between the pair of the wide regions.
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(canceled)
A structure comprising:
- a waveguide absorber comprising sections of discontinuous, separated semiconductor material;
- gaps between each of the sections of discontinuous, separated semiconductor material;
- and
- insulator material over the waveguide absorber and within the gaps formed between sections of the discontinuous, separated semiconductor material.
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A structure comprising:
- a semiconductor waveguide component;
- a concentrically configured spiraled waveguide absorber composed of semiconductor material with voids between discrete, separated sections of the semiconductor material which form a grating pattern between the discrete, separated sections of the semiconductor material of the concentrically configured spiraled waveguide absorber;
- and
- insulator material over the concentrically spiraled waveguide absorber and within the voids, separating each of the discrete, separated sections of the semiconductor material.
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Dependencies are inferred from the claim text.