Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition
AssigneeApplied Materials, Inc.
InventorsKang Luo, Xiaopei Deng, Daihua Zhang, Ludovic Godet
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsKang Luo, Xiaopei Deng, Daihua Zhang, Ludovic Godet
Estimating the term…
Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing optical devices having optical device structures with at least one of varying depths or refractive indices across the surface of a substrate. According to certain embodiments, an inkjet process is used to deposit a volumetrically variable optical device that is etched to form a diffractive optic element (DOE). Volumetrically variable can relate to the thickness of the optical device, or the relative volume of two or more diffractive materials deposited in combination. According to other embodiments, a single-profile DOE is deposited on a substrate and an inkjet process deposits a volumetrically variable organic material over the DOE. The DOE and organic material are etched to modify the profile of the structure, after which the organic material is removed, leaving the modified-profile DOE.
A system for fabricating a diffractive optics element (DOE) comprising:
A non-transitory computer-readable storage medium storing instructions that, when executed by a processor of a processing system, cause the processing system to:
A system for fabricating a diffractive optics element (DOE) comprising:
Dependencies are inferred from the claim text.