Transfer apparatus for inspection apparatus, inspection apparatus, and object inspection method using same
AssigneeKoh Young Technology Inc.
InventorsMyong KANG, Kang Jo HWANG, Choung Min JUNG
Life of this patent
Estimating the term…
Abstract
A transfer apparatus for an inspection apparatus according to one embodiment of the present disclosure includes: an upper end engaging portion configured to make contact with an upper surface of a transferred article; a support frame to which the upper end engaging portion is fixed; a lift including a support part configured to support a lower surface of the transferred article, the lift arranged on the support frame to be movable in an up-down direction; and a lifting driver configured to provide a driving force to move the lift in the up-down direction.
Claims20
A transfer apparatus for an inspection apparatus, comprising:
- an upper end engaging portion configured to make contact with an upper surface of a transferred article including an inspection object;
- a support frame to which the upper end engaging portion is fixed;
- a lift including a support part configured to support a lower surface of the transferred article, the lift arranged on the support frame to be movable in an up-down direction;
- and
- a lifting driver configured to provide a driving force to move the lift in the up-down direction.
Dependencies are inferred from the claim text.