Jig for inspection apparatus, inspection apparatus, and inspection set
AssigneeKoh Young Technology Inc.
InventorsMyong KANG, Kang Jo HWANG, Choung Min JUNG
Life of this patent
Estimating the term…
Abstract
An inspection apparatus according to one embodiment of the present disclosure is configured to inspect an inspection object seated on a jig, the jig capable of being introduced into and withdrawn from the inspection apparatus. The inspection apparatus includes: a mover configured to move the jig; and a clamping driver configured to contact and press the jig, the clamping driver including a pressing portion configured to be movable in a clamping direction and an unclamping direction opposite to the clamping direction.
Claims20
An inspection set, comprising:
- a jig configured to allow an inspection object to be seated thereon;
- and
- an inspection apparatus configured to inspect the inspection object, the jig capable of being introduced into and withdrawn from the inspection apparatus,
- wherein the jig includes at least one damper configured to be capable of moving in a clamping direction in which the inspection object is clamped to the jig and to be capable of moving in an unclamping direction opposite to the clamping direction, and
- the inspection apparatus includes:
- a mover configured to move the jig;
- and
- at least one clamping driver configured to contact and press the damper.
An inspection apparatus configured to inspect an inspection object seated on a jig, the jig capable of being introduced into and withdrawn from the inspection apparatus, the inspection apparatus comprising:
- a mover configured to move the jig;
- and
- a clamping driver configured to contact and press the jig, the clamping driver including a pressing portion configured to be movable in a clamping direction and an unclamping direction opposite to the clamping direction.
A jig for an inspection apparatus, which is configured to allow an inspection object to be seated thereon, capable of being introduced into and withdrawn from the inspection apparatus for inspecting the inspection object, the jig comprising:
- a damper configured to be movable in a clamping direction in which the inspection object is clamped and to be movable in an unclamping direction opposite to the clamping direction;
- and
- a clamping guide configured to guide movement of the damper,
- wherein the damper includes:
- an object contact portion configured to be capable of making contact with the inspection object;
- and
- a driving contact portion configured to be capable of making contact with the inspection apparatus to receive a driving force to move the damper.
(canceled)
Dependencies are inferred from the claim text.