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OwnerMartin Rambachinventor
Estimating the term…
A sensor component. The sensor component includes a microelectromechanical z inertial sensor, including two sensor elements situated on a substrate and each designed in the form of a z rocker. The sensor elements each includes a seismic mass structure, elastically deflectable with respect to the substrate with the aid of a torsion spring, which has a heavy side and an oppositely situated light side with regard to the torsion springs. The seismic mass structure of the two sensor elements have different perforations on its heavy and/or light side(s), which effectuate a different sensitivity of the two sensor elements to a temperature gradient running in the z direction. The sensor component also includes an evaluation circuit designed to ascertain an acceleration in the z direction by evaluating the deflection of the seismic mass structure of the two sensor elements.
A sensor component, comprising:
A microelectromechanical z inertial sensor for a microelectromechanical sensor component, the micromechanical z intertial sensor including two sensor elements situated on a substrate, each of the sensor elements being in the form of a z rocker, the sensor elements each include a seismic mass structure, elastically deflectable with respect to the substrate with the aid of a torsion spring, which has a heavy side and an oppositely situated light side with regard to the torsion spring, the seismic mass structure of the two sensor elements have different perforations on their heavy and/or light sides, which effectuate a different sensitivity of the two sensor elements to a temperature gradient running in a z direction.
A method for ascertaining an acceleration in a z direction using a microelectromechanical z inertial sensor, which includes two sensor elements which are each in the form of a z rocker, each of the sensor elements including a seismic mass structure which is elastically deflectable using a torsion spring, the two sensor elements having an identical sensitivity to an acceleration in a z direction and a different sensitivity to a temperature gradient running in the z direction, the method comprising the following steps:
Dependencies are inferred from the claim text.