Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same
AssigneeNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
InventorsMaarten Hubertus VAN ES, Abbas MOHTASHAMI, Benoit Andre Jacques QUESSON, Paul Louis Maria Joseph VAN NEER
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Abstract
A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.
Claims14
An ultrasound acoustic microscopy device comprising:
- a carrier for carrying a sample;
- a signal generator configured to generate an actuation signal having a frequency of at least 1 GHz to be converted into an ultrasound acoustic signal for transmission;
- a scanning head including a cantilever with separate tips for transmitting an acoustic wave into the sample and for receiving acoustic waves reflected from features within the sample, the separate tips comprising:
- a transmission tip configured to contact a sample to transmit the ultrasound acoustic signal as an ultrasound acoustic wave into the sample, and
- a reception tip, separate from the transmission tip, to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound acoustic wave from within the sample;
- a signal processor configured to generate an image signal in response to a sensor signal generated in response to the acoustic signal resulting from reflections received by the reception tip;
- and
- a scanning mechanism configured to displace the scanning head relative to the sample, along a surface of the sample.
A lithographic system including at least one ultrasound acoustic microscopy device, the ultrasound acoustic microscopy device comprising:
- a carrier for carrying a sample;
- a signal generator configured to generate an actuation signal having a frequency of at least 1 GHz to be converted into an ultrasound acoustic signal for transmission;
- a scanning head including a cantilever with separate tips for transmitting an acoustic wave into the sample and for receiving acoustic waves reflected from features within the sample, the separate tips comprising:
- a transmission tip configured to contact a sample to transmit the ultrasound acoustic signal as an ultrasound acoustic wave into the sample, and
- a reception tip, separate from the transmission tip, to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound acoustic wave from within the sample;
- a signal processor configured to generate an image signal in response to a sensor signal generated in response to the acoustic signal resulting from reflections received by the reception tip;
- and
- a scanning mechanism configured to displace the scanning head relative to the sample, along a surface of the sample.
Dependencies are inferred from the claim text.