Multifunctional heterojunction metal oxide gas sensor
AssigneeInternational Business Machines Corporation
InventorAndrea Fasoli
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Abstract
A method of identifying a gas is provided. The method includes providing a gas sensor device comprising at least two stacked metal oxide layers, wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the stacked metal oxide layers. The method includes bringing the gas into proximity with the stacked metal oxide layers. The method also includes measuring the conductance of the gas sensor device when the gas is in proximity with the stacked layers at multiple temperatures to generate a temperature-conductance profile. The method also includes identifying a gas of interest based on the temperature-conductance profile.
Claims20
A method of identifying a gas, the method comprising:
- providing a gas sensor device comprising at least two stacked metal oxide layers, wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the stacked metal oxide layers;
- bringing the gas into proximity with the stacked metal oxide layers;
- measuring the conductance of the gas sensor device when the gas is in proximity with the stacked layers at multiple temperatures to generate a temperature-conductance profile;
- and
- identifying a gas of interest based on the temperature-conductance profile.
A multifunctional heterojunction metal oxide gas sensor device comprising:
- a substrate;
- at least two electrodes formed on the substrate;
- a first metal oxide layer formed on the substrate and the electrodes;
- and
- a second metal oxide layer formed on the first metal oxide layer,
- wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the first and second metal oxide layers.
Dependencies are inferred from the claim text.