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US 2022/0091041 A1Published application
Nanowire array for use with raman spectroscopy
OwnerXiaoan Fuinventor
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Abstract
The present invention is directed to microfabricated silicon nanowire arrays, and more particularly, to microfabricated silicon nanowire arrays for use with surface enhanced Raman spectroscopy (SERS) and methods of making and using the same in the detection of trace chemicals analytes in liquid and gaseous samples.
Claims22
1) A device for collecting at least one chemical analyte from a gaseous or liquid sample, the device comprising:
- a substrate;
- a plurality of nanowires extending substantially perpendicularly from the substrate, wherein each nanowire includes a base attached to the substrate and a tip opposite the base;
- and
- an Ag nanoparticle coating disposed at least on the tips of the plurality of nanowires;
- wherein the Ag nanoparticle coating is capable of forming a conjugate with the at least one chemical analyte to thereby retain the at least one chemical analyte with the device.
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5) A process for fabricating a nanowire array, comprising:
- providing a silicon substrate;
- forming a nanowire array on the silicon substrate;
- applying an Ag thin film coating on the nanowire array;
- and
- cracking the Ag thin film coating to form a plurality of Ag nanoparticles on the nanowire array.
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16) A method for detection and quantification of a chemical analyte, the method comprising:
- providing a detection device including
- a substrate,
- a plurality of nanowires extending substantially perpendicularly from the substrate, wherein each nanowire includes a base attached to the substrate and a tip opposite the base, and
- an Ag nanoparticle coating disposed at least on the tips of the plurality of nanowires,
- wherein the Ag nanoparticle coating is capable of forming a conjugate with the at least one chemical analyte to thereby retain the chemical analyte with the device;
- contacting the detection device with the chemical analyte to retain at least a portion of the chemical analyte with the detection device;
- analyzing the chemical analyte retained with the detection device to detect and quantify the chemical analyte.
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Dependencies are inferred from the claim text.