Sensor device and method for producing a sensor device

A sensor device, comprising:

• a substrate;
• at least one electrical insulation layer on the substrate;
• an edge structure that is disposed on the at least one electrical insulation layer and delimits an internal region above the substrate;
• a membrane that is anchored on the edge structure and at least partly spans the internal region, the membrane encompassing, in the internal region, a region movable by a pressure;
• a first intermediate carrier that extends in the movable region below the membrane and is electrically and mechanically connected to the membrane by contact points, the membrane being able to be stiffened by the first intermediate carrier, and the first intermediate carrier representing a movable electrode, and encompasses at least one spacing element that extends from the intermediate carrier toward the substrate;
• and
• a first counter electrode on the at least one electrical insulation layer, the first counter electrode extending under the intermediate carrier, and a first distance between the intermediate carrier and the first counter electrode being modifiable by the pressure on the movable region, and the first counter electrode encompassing, under the intermediate carrier, at least one electrically separated region that is disposed below the spacing element and has at least a lateral extent of the spacing element.

A method for producing a sensor device, comprising the following steps:

• furnishing a substrate having at least one electrical insulation layer, and disposing an electrically conductive layer on the electrical insulation layer;
• patterning the electrically conductive layer into a first counter electrode in an internal region and patterning the first counter electrode, at least one region electrically separated from the first counter electrode being configured in the internal region;
• and
• disposing a first intermediate carrier at a first distance above the first counter electrode using at least one spacing element that extends away from the intermediate carrier toward the substrate, so that the spacing element is located above the separated region and is spaced away from the separated region, an edge structure being configured on the electrical insulation layer and a membrane being anchored on the edge structure and at least partly spanning the internal region, the membrane encompassing in the internal region a region movable by a pressure, and the intermediate carrier extending in the movable region below the membrane and being electrically and mechanically connected to the membrane by contact points, the membrane being stiffened by the first intermediate carrier, and the first intermediate carrier representing a movable electrode, and the spacing element having a lateral extent that is the same as or less than an extent of the separated region.