Flanged joint and method of fluidly connecting two components
AssigneeApplied Materials, Inc.
InventorsLukas KREMSER, Andreas SAUER, Stefan BANGERT
Life of this patent
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Abstract
A flanged joint is described. The flanged joint has a first flange member with a first sealing surface and a second flange member with a second sealing surface. The flanged joint further has a hollow-metal gasket between the first flange member and the second flange member, and a spacer between the first flange member and the second flange member. The spacer defines a minimum distance between the first flange member and the second flange member. The flanged joint can be configured to seal a metal-conveying volume.
Claims20
A flanged joint, comprising:
- a first flange member having a first sealing surface;
- a second flange member having a second sealing surface;
- a hollow-metal gasket between the first flange member and the second flange member;
- and
- a spacer between the first flange member and the second flange member, the spacer defining a minimum distance between the first flange member and the second flange member.
A method of fluidly connecting a first component to a second component, the method comprising:
- connecting a first flange member having a first sealing surface to the first component;
- connecting a second flange member having a second sealing surface to the second component;
- arranging a hollow-metal gasket between the first flange member and the second flange member;
- arranging a spacer between the first flange member and the second flange member;
- and
- connecting the first flange member to the second flange member, wherein
- the hollow-metal gasket forms a seal between the first sealing surface and the second sealing surface, and wherein
- the spacer defines a minimum distance between the first flange member and the second flange member.
Dependencies are inferred from the claim text.