Pump monitoring apparatus, vacuum pump, pump monitoring method, and storage medium storing pump monitoring program
AssigneeShimadzu Corporation
InventorKiyonori HIROTA
Life of this patent
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AssigneeShimadzu Corporation
InventorKiyonori HIROTA
Estimating the term…
A pump monitoring apparatus comprises a computer. The computer includes a processor and a memory, and the computer executes; a waveform data acquisition section configured to acquire waveform data of a physical quantity indicating an operation state of a vacuum pump; a feature quantity acquisition section configured to acquire a feature quantity of the waveform data; a first mechanical learning section configured to cluster the waveform data based on the feature quantity; a second mechanical learning section configured to read a time-series data group of the clustered waveform data to output predicted waveform data; and an information providing section configured to provide information regarding replacement or maintenance of the vacuum pump based on the predicted waveform data.
A pump monitoring apparatus comprising a computer, wherein the computer includes a processor and a memory, and the computer executes;
A pump monitoring method comprising:
A storage medium for storing a pump monitoring program causing a computer to execute
Dependencies are inferred from the claim text.