Silicon carbide wafer and method of preparing the same
AssigneeSenic Inc.
InventorsJong Hwi PARK, Kap-Ryeol KU, Jung Woo CHOI, Byung Kyu JANG, Myung-Ok KYUN, Jung-Gyu KIM, Jung Doo SEO
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AssigneeSenic Inc.
InventorsJong Hwi PARK, Kap-Ryeol KU, Jung Woo CHOI, Byung Kyu JANG, Myung-Ok KYUN, Jung-Gyu KIM, Jung Doo SEO
Estimating the term…
The method of preparing a silicon carbide ingot includes: disposing a raw material and a silicon carbide seed crystal to be separated in a reactor having an internal space; adjusting a temperature, a pressure, and an atmosphere of the internal space for sublimating the raw material and growing the silicon carbide ingot on the silicon carbide seed crystal; and cooling the reactor and retrieving the silicon carbide ingot, wherein the adjusting proceeds in a first inert gas atmosphere having a flow quantity of 100 sccm to 300 sccm, the cooling proceeds in a second inert gas atmosphere having a flow quantity of 1 sccm to 250 sccm, and the reactor has a thermal conductivity of 120 W/mK or less.
A method of preparing a silicon carbide ingot comprising:
A method of preparing a silicon carbide wafer comprising:
Dependencies are inferred from the claim text.