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US 2022/0090289 A1Published application
Method of automatically measuring seed melt back of crystalline material
AssigneeGTAT Corporation
InventorJohn T. Mac Donald
Life of this patent
Estimating the term…
Abstract
A method and apparatus for measuring a melt back of a seed in a boule are provided. The method includes lifting a boule once it has been produced using an actuating device onto a support table to automatically manipulate the boule from a furnace to the support table. The melt back of the seed is then automatically measured using a vision system that is installed on an imaging device disposed below the boule.
Claims20
A method comprising:
- receiving a melt back measurement indicating a melt back of a seed within a boule that is formed inside a crucible of a furnace, wherein a vision system automatically measures the melt back by measuring a diameter of the seed after the boule is formed, the vision system being installed on an imaging device disposed below a bottom of the boule;
- and
- adjusting a temperature setting of the furnace based on the melt back measurement.
An apparatus comprising:
- a vision system configured to automatically measure a melt back of a seed within a boule that is formed inside a crucible of a furnace by measuring a diameter of the seed after the boule is formed, wherein the vision system is installed on an imaging device disposed below a bottom of the boule;
- and
- a controller configured to receive a melt back measurement indicating the melt back of the seed and adjust a temperature setting of the furnace based on the melt back measurement.
Dependencies are inferred from the claim text.