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US 2022/0090282 A1Published application
Manufacturing method of aluminum nitride
AssigneeMing Chi University of Technology
InventorsKun-Cheng PENG, Chun-Ying LEE, Chi-Ting CHUNG
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Abstract
The present disclosure provides a manufacturing method of aluminum nitride, including: providing an electrolyte including choline chloride, urea, aluminum chloride, boric acid, and ascorbic acid; disposing a workpiece, wherein at least a part of the workpiece is in contact with the electroplating solution; heating the electrolyte to within 60° C.-95° C.; applying an operating current to electroplate aluminum onto the workpiece; and annealing the aluminum on the workpiece to form aluminum nitride.
Claims10
A manufacturing method of aluminum nitride, comprising:
- providing an electrolyte comprising choline chloride, urea, aluminum chloride, boric acid, and ascorbic acid;
- disposing a workpiece, wherein at least a part of the workpiece is in contact with the electrolyte;
- heating the electrolyte to within 60° C. to 95° C.;
- applying an operating current to electroplate aluminum onto the workpiece;
- and
- annealing the aluminum on the workpiece to form aluminum nitride.
3 more elements
Dependencies are inferred from the claim text.