Transparent electrode for oxygen production, method for producing same, tandem water decomposition reaction electrode provided with same, and oxygen production device using same
AssigneesMitsubishi Chemical Corporation, The University of Tokyo, Japan Technological Research Association of Artificial Photosynthetic Chemical Process, National Institute of Advanced Industrial Science and Technology
InventorsHiroshi NISHIYAMA, Tomohiro HIGASHI, Yutaka SASAKI, Taro YAMADA, Kazunari DOMEN, Yohichi SUZUKI, Seiji AKIYAMA
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Abstract
A method foe producing a transparent electrode for oxygen production having a Ta nitride layer on a transparent substrate, including: a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas containing ammonia and a carrier gas.
Claims13
A transparent electrode for oxygen production in which a nitride semiconductor layer and a Ta nitride layer are stacked in this order on a transparent substrate.
Dependencies are inferred from the claim text.