Vaporizable source material container and solid vaporization/supply system using the same

A vaporizable source material container for storing and vaporizing a metal halide for thin film deposition to be used as a vaporizable source material, the vaporizable source material container comprising:

• a container main body including a container wall;
• a lid body configured to be detachably fixed to the container main body, and provided with a carrier gas inlet for introducing a carrier gas into the container main body and a mixed gas outlet for leading a mixed gas of the vaporized metal halide for thin film deposition with the carrier gas to the outside;
• fastening members for fixing the container main body with the lid body;
• and
• joint members arranged at the carrier gas inlet and the mixed gas outlet of the lid body,
• wherein the container wall has a double-wall structure composed of an inner wall member and an outer wall member,
• wherein the carrier gas introduced from the carrier gas inlet is led into the container main body via a space between the inner and outer wall members of the double-wall structure,
• wherein the container wall of the container main body is fabricated of copper with 99 to 99.9999% purity, aluminum with 99 to 99.9999% purity, or titanium with 99 to 99.9999% purity, and
• wherein the container main body, the lid body, the fastening members, and the joint members are each treated by fluorocarbon polymer coating and/or by electrolytic polishing on its surface.