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US 2022/0089910 A1Published application
Calcium carbonate slurry
AssigneeIllumina, Inc.
InventorsRobert Yang, Samantha K. Brittelle, You-Jung Cheng, Scott William Bailey, James M. Tsay
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Abstract
A composition is provided that comprises a calcium carbonate slurry. The calcium carbonate slurry comprises a plurality of calcium carbonate particles suspended in a solution, where the solution comprises a dispersant and an anionic surfactant. The concentration of the calcium carbonate particles in the calcium carbonate slurry is equal to or less than about 2.0 wt. %.
Claims15
A method, comprising:
- polishing a surface of a substrate with a calcium carbonate slurry, wherein the substrate is coated with a soft material, wherein the calcium carbonate slurry comprises a dispersant, an anionic surfactant, and a plurality of calcium carbonate particles suspended in a solution.
A method, comprising:
- mixing a dispersant and an anionic surfactant into a solution;
- and
- adding a plurality of calcium carbonate particles suspended in the solution to form a slurry, wherein a concentration of the calcium carbonate particles in the slurry is less than about 2.0 wt. %.
Dependencies are inferred from the claim text.