Polishing liquid and chemical mechanical polishing method
AssigneeFUJIFILM Corporation
InventorTetsuya KAMIMURA
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AssigneeFUJIFILM Corporation
InventorTetsuya KAMIMURA
Estimating the term…
An object of the present invention is to provide a polishing liquid which reduces the occurrence of erosion and scratches on a surface to be polished of an object to be polished having a cobalt-containing film after polishing in a case where the polishing liquid is applied to CMP of the object to be polished. In addition, another object of the present invention is to provide a chemical mechanical polishing method using the above-mentioned polishing liquid. The polishing liquid of an embodiment of the present invention is a polishing liquid used for chemical mechanical polishing of an object to be polished having a cobalt-containing film, the polishing liquid including colloidal silica, an organic acid, a specific nitrogen-containing aromatic heterocyclic compound, and hydrogen peroxide, in which a pH is 8.5 to 12.
A polishing liquid used for chemical mechanical polishing of an object to be polished having a cobalt-containing film, the polishing liquid comprising:
A polishing liquid used for chemical mechanical polishing of an object to be polished, the polishing liquid comprising:
Dependencies are inferred from the claim text.