Polycrystalline Silicon Lump, Packaging Body Thereof, and Method for Producing Same
AssigneeTokuyama Corporation
InventorManabu Sakida
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Abstract
A polycrystalline silicon lump packaging body is a packaging body in which the resin bag is filled with the polycrystalline silicon lumps having a surface metal concentration of 1000 pptw or less, in which a nitrate ion amount and preferably a fluorine ion amount present inside the packaging body are each 50 μg/L or less with respect to a filling void of the polycrystalline silicon lumps formed when the packaging body is left at 25° C. under 1 atm.
Claims9
A polycrystalline silicon lump packaging body in which a resin bag is filled with polycrystalline silicon lumps having a surface metal concentration of 100 pptw or less, wherein
- a nitrate ion amount present inside the packaging body is 5 μg/L or less with respect to a filling void of the polycrystalline silicon lumps formed when the packaging body is left at 25° C. under 1 atm.
A polycrystalline silicon lump having a surface metal concentration of 100 pptw or less and a surface nitrate ion amount of 1.0×10−5 μg/mm2 or less.
Dependencies are inferred from the claim text.