Imprinting method for improving demolding stability and the related system
AssigneeEver Radiant Incorporation
InventorSung-Wen TSAI
Life of this patent
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AssigneeEver Radiant Incorporation
InventorSung-Wen TSAI
Estimating the term…
An imprinting method includes the steps of: adding a soluble material to a master mold; solidifying the soluble material to form a soluble mold; positioning an adhesive on a side of the soluble mold opposite to the master mold; attaching a taking device to the adhesive; removing the taking device from the master mold together with the soluble mold; positioning the soluble mold on a polymer layer; applying a first high temperature and a pressure to the soluble mold to form a transferred pattern corresponding to a convex-concave pattern of the soluble mold on the polymer layer and separate a support plate and a tape of the taking device; applying a second high temperature to the soluble mold to solidify the polymer layer; and dissolving the soluble mold by using a solvent to separate the solidified polymer layer and the support plate.
An imprinting method, comprising:
Dependencies are inferred from the claim text.