Beam-forming and deflecting optical system for a laser machining device, and method for machining a workpiece using a laser beam

2:

• The laser machining device (10) as claimed in claim 1 wherein all optical wedges (5, 6) have quantitatively equal wedge angles (|α1|).

3:

• The laser machining device (10) as claimed in claim 1, wherein the optical wedges (5, 6) in each case cover between 25% and 50% of the laser beam (L).

4:

• The laser machining device (10) as claimed in claim 1, wherein the optical wedges (5, 6) are formed in the shape of a sector of a circle or in the shape of a segment of a circle.

5:

• The laser machining device (10) as claimed in wherein the optical wedges (5, 6) are in each case arranged in a hollow shaft (7, 8).

6:

• The laser machining device (10) as claimed in claim 1, wherein the wedge angle (α1) of the optical wedges (5, 6) is at least 1 millirad, preferably between 3 millirads and 15 millirads.

7:

• The laser machining device (10) as claimed in claim 1, wherein at least one actual value sensor (16) is provided for the determination of the position of the optical wedges (5, 6) or hollow shafts (7, 8), respectively.

8:

• The laser machining device (10) as claimed in claim 1, wherein the optical wedges (5, 6) are made of quartz glass, borosilicate-crown glass, zinc selenide, or zinc sulfide.

9:

• The laser machining device (10) as claimed in claim 1, wherein all optical wedges (5, 6) or the hollow shafts (7, 8), respectively, are connected to a respective drive (4) for the independent rotation of each optical wedge (5, 6) about the optical axis (c).

10:

• The laser machining device (10) as claimed in claim 1, wherein a drive (9) for the joint rotation of all optical wedges (5, 6) or hollow shafts (7, 8), respectively, is provided.

11:

• The laser machining device (10) as claimed in claim 1, wherein the at least one drive (4, 9) is connected to a motor control (11).

12:

• A method for machining a workpiece (W) using a collimated laser beam (L), wherein the collimated laser beam (L) runs through a beam-forming and deflecting optical system (1) comprising at least two optical elements (2, 3), which are arranged one behind the other in the beam direction (z) of the laser beam (L), in the form of at least two optical wedges (5, 6) with a respective wedge angle (al), and a focusing lens (15), wherein at least one optical wedge (5) is rotated about the optical axis (c) relative to the at least one other optical wedge (6) of the beam-forming and deflecting optical system (1), wherein the laser beam (L) is only partly covered by the optical wedges (5, 6), which are arranged one behind the other.

13:

• The method as claimed in claim 12, wherein the laser beam (L) runs through at least two optical wedges (5, 6) with quantitatively equal wedge angle (|α1|).

14:

• The method as claimed in claim 12, wherein the optical wedges (5, 6) are rotated at a rotational speed of between 100 and 10000 U/min, preferably between 500 and 7000 U/min.

15:

• The method as claimed in claim 12, wherein the position and rotation of the at least two optical wedges (5, 6) are detected using at least one actual value sensor (16).