System and method of measuring warpage of a workpiece on a noncontact support platform

A system for determination of warpage in a workpiece supported by a non-contact support platform, the system comprising:

• a surface comprising a plurality of pressure ports and a plurality of fluid evacuation ports on the surface;
• a supply system, comprising a pressure supply connected to the plurality of pressure ports on the surface and configured to maintain a substantially constant flowrate and evacuate a fluid into the plurality of evacuation ports, so as to support a workpiece by fluid-bearing formed under the workpiece;
• and
• at least one manometer, coupled to a controller and configured to measure the pressure at the surface,
• wherein the workpiece is determined to be warped when the measured pressure is outside a predefined pressure level.

A system for determination of warpage in a workpiece supported by a non-contact support platform, the system comprising:

• a surface comprising a plurality of pressure ports and a plurality of fluid evacuation ports on the surface;
• a supply system, having known relationship between pressure and flowrate for a flat supported workpiece, the supply system comprising a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece;
• and
• at least one flowmeter or at least one manometer, coupled to a controller and configured to measure the flowrate or the pressure in the supply system or at the surface,
• wherein the workpiece is determined to be warped when the measured flowrate or pressure is outside a predefined range.