Device and method for producing fine glass particle deposited body

A method for manufacturing a glass fine particle deposited body, which manufactures the glass fine particle deposited body by depositing a glass fine particle on a starting rod disposed in a reaction vessel, the method comprising:

• arranging a burner and a vaporizer in a moving mechanism;
• vaporizing liquid siloxane by the vaporizer to produce raw material gas;
• heating a pipe that supplies the vaporized raw material gas from the vaporizer to the burner at heating temperature of 230° C. or higher;
• depositing the glass fine particle synthesized from the raw material gas sprayed from the burner on the starting rod;
• and
• integrally retracting the burner and the vaporizer by the moving mechanism as a diameter of the glass fine particle deposited body increases.

A method for manufacturing a glass fine particle deposited body using an apparatus which includes a burner, a vaporizer, a pipe which connects the vaporizer and the burner, a reaction vessel, and a starting rod disposed in the reaction vessel, the method comprising:

• vaporizing liquid siloxane by the vaporizer to produce raw material gas;
• heating the pipe at heating temperature of 230° C. or higher;
• depositing a glass fine particle synthesized from the raw material gas sprayed from the burner on the starting rod to form the glass fine particle deposited body;
• and
• integrally retracting the burner and the vaporizer as a diameter of the glass fine particle deposited body increases.