Imprint device, information processing device, and imprint method
AssigneeKioxia Corporation
InventorHirotaka TSUDA
Life of this patent
Estimating the term…
Abstract
An imprint device of an embodiment includes an imaging device and a controller. The controller acquires, from the imaging device, a reference image which is a captured image of the template before the imprint operation at a predetermined imprint position and an imprint image which is a captured image of the template during the imprint operation at the imprint position. The control unit acquires features based on interference fringes appearing on the template during the imprint operation from a difference image representing a difference between the reference image and the imprint image. The control unit performs processes for controlling the imprint operation based on the features.
Claims20
An imprint device comprising:
- a holder that holds a template;
- a stage on which a substrate is mounted;
- an imaging device that acquires a captured image of the template;
- and
- a controller that performs processes for controlling an imprint operation of pressing the template against a resin film disposed on the substrate based on the captured image,
- wherein the controller
- acquires, from the imaging device, a reference image which is the captured image of the template before the imprint operation at a predetermined imprint position, and an imprint image which is the captured image of the template during the imprint operation at the imprint position,
- acquires features based on interference fringes appearing on the template during the imprint operation, from a difference image representing a difference between the reference image and the imprint image, and
- performs a process for controlling the imprint operation based on the features.
An information processing device configured to control an imprint device that forms a predetermined pattern on a resin film disposed on a substrate by performing an imprint operation of pressing a template against the resin film, the information processing device comprising:
- a connecter connected to an imaging device that acquires a captured image of the template;
- and
- a controller that performs processes for controlling the imprint operation based on the captured image,
- wherein the controller
- acquires, via the connecter, a reference image which is the captured image of the template before the imprint operation at a predetermined imprint position, and an imprint image which is the captured image of the template during the imprint operation at the imprint position,
- acquires features based on interference fringes appearing on the template during the imprint operation, from a difference image representing a difference between the reference image and the imprint image, and
- performs a process for controlling the imprint operation based on the features.
An imprint method of forming a predetermined pattern on a resin film disposed on a substrate by performing an imprint operation of pressing a template against the resin film, the imprint method comprising:
- acquiring a captured image of the template by an imaging device;
- acquiring, from the imaging device by an information processing device, a reference image which is the captured image of the template before the imprint operation at a predetermined imprint position and an imprint image which is the captured image of the template during the imprint operation at the imprint position;
- acquiring, by the information processing device, features based on interference fringes appearing on the template during the imprint operation, from a difference image representing a difference between the reference image and the imprint image;
- and
- performing, by the information processing device, a process for controlling the imprint operation based on the features.
Dependencies are inferred from the claim text.