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US 2022/0075263 A1Published application
Manufacturing a flowcell with a planar waveguide
AssigneeIllumina, Inc.
InventorsDajun Yuan, M. Shane Bowen, Zhong Mei
Life of this patent
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Abstract
Provided in one example is a method of manufacturing a flowcell that includes: forming a core layer, the core layer disposed between a substrate and a nanowell layer, the nanowell layer having nanowells to receive a sample, the core layer having a higher refractive index than the substrate and the nanowell layer; and forming a grating to couple light to the core layer.
Claims25
A method of manufacturing a flowcell, the method comprising:
- forming a core layer, the core layer disposed between a substrate and a nanowell layer, the nanowell layer having nanowells to receive a sample, the core layer having a higher refractive index than the substrate and the nanowell layer;
- and
- forming a grating using nanoimprinting to couple light to the core layer.
A flowcell, comprising:
- a substrate;
- a nanowell layer having nanowells to receive a sample;
- a core layer disposed between the substrate and the nanowell layer, the core layer having a higher refractive index than the substrate and the nanowell layer;
- and
- a grating to couple light to the core layer, wherein the grating is disposed over the substrate and has a first group of ridges adjacent a first side of the substrate and a second group of ridges adjacent a second side of the substrate, the first group of ridges being spaced apart from the second group of ridges by an area beneath the nanowells that is substantially free of ridges.
2 more elements
Dependencies are inferred from the claim text.