Three-dimensional measurement apparatus and three-dimensional measurement method

A three-dimensional measurement apparatus that measures a plurality of measurement targets placed in a target measurement area on a measurement object by a predetermined three-dimensional measurement technique, the three-dimensional measurement apparatus comprising:

• a measurement module that:
• is positioned with respect to the target measurement area, and comprises:
• a first irradiator that irradiates the target measurement area with predetermined light for height measurement of the measurement object within the target measurement area;
• a second irradiator that irradiates the target measurement area with predetermined patterned light for three-dimensional measurement of the measurement targets;
• and
• an imaging device that takes an image of the target measurement area irradiated with either the predetermined light or the predetermined patterned light;
• and
• a control device that:
• obtains, based on image data taken by the imaging device when the target measurement area is irradiated with the predetermined light, target height information on the measurement object within target measurement area;
• calculates, based on the target height information, reference height information on a reference surface of each of the measurement targets within the target measurement area;
• specifies, based on the reference height information and with respect to each of the measurement targets, a required focusing range for imaging an entire range in a height direction of each of the measurement targets in a focusing state;
• maps, based on the required focusing range and a field of depth of the imaging device, a height position of the measurement module to each of the measurement targets at the height position;
• moves the measurement module in the height direction and successively positions the measurement module at a predetermined height position determined by the mapping;
• and
• performs, based on image data taken by the imaging device under the predetermined patterned light, three-dimensional measurement to the measurement targets at the predetermined height position.